The study of the internet of things(IOT)is a hot topic all over the world.It is named as the third revolution of the information industry,and its related industries have huge potential applications.This chapter focuses on Microelectromechanial Systems(MEMS),one of the core technologies of IOT,in terms of its technologies,the development,and the application in IOT.The products of microsensors and microactuators applied in IOT is introduced plus their potential future applied for IOT. <<