Lithography is known as “the jewel in the crown of semiconductor industry” and is the core equipment of integrated circuit manufacturing industry. This chapter analyzes the development path of lithography industry，analyzes the layout of global industrial chain and innovation chain，the evolution of lithography technology，ASML’s development history，China’s industrial policy and other perspectives，and looks into the future development direction of China’s lithography industry. China is still limited by technical bottlenecks in the field of lithography. From the perspective of national strategy，both the government and enterprises need to be prepared for a “protracted war” in lithography research and development to ensure the coherence of lithography industrial policies. From the perspective of policy，on the one hand，government departments need to promote the formation of good upstream and downstream cooperation，improve the precision of policy targeting and pay attention to the construction of R&D system；On the other hand，it is necessary to promote the industrial division of labor and strengthen the openness and cooperation，accelerate the process of lithography industry chain.